The Helios NanoLab 600 FIB is the workhorse of CAMM for site-specific TEM sample preparation. This microscope is used to prepare TEM membranes as well as develop Slice and View technology for creating data sets serially through a volume of material. The Helios is equipped with an Elstar field-emission electron column for high-resolution, sub-nanometer SEM imaging and a Sidewinder ion column (FIB) for machining and Pt deposition. These beams may be used in a number of different capacities such as high resolution thru-lens backscattered electron imaging for phase contrast characterization or secondary ion imaging for grain contrast. The Helios is equipped with an OMNIProbe in-situ micromanipulator for in-situ preparation of site specific TEM foils. Chemical analysis is also possible with use of the EDAX analysis equipment. CAMM also has Software programs such as Slice and View™ that performs automated collection of data serially through a volume for visual representation, as well as 3D-reconstruction.

While this FIB is mainly used for site-specific TEM preparation, it is also used for:
• Serial sectioning of structural alloys for 3-D micro-structural representation
• Machining atomic force microscopy (AFM) samples that require a radius of curvature less than 100 nm at the tip
• Machining of pillars from bulk material to investigate size scale effects through compression
• Fabrication of low resistance connections between nanowires for nanoelectronic devices

CAMM Helios NanoLab 600 DBFIB

• Elstar Electron Column
  • Thru-Lens Detector
  • High-resolution, sub-nanometer range imaging
• Sidewinder ion column (Ga+) provides low kV (0.5kV) cleaning for TEM samples
  
• Pt GIS
  
• Omniprobe for in-situ preparation of TEM specimen
  
• EDAX EDS analysis equipment
  
• Oxford Instruments HKL EBSD system
  
• Software
  
  • Slice and View
    
  • AutoTEM
    
  • AutoFIB
    
  • RunScript